Multiphysics investigation of gas sensor packages

A miniaturized ozone gas sensor working with UV-light was investigated and aspects of its heterointegration were reviewed, simulated and analyzed. We analyzed possible interactions of the integration of functional optical elements together with MEMS-based physical sensors. Gas diffusion into the package and light propagation inside the package were simulated amongst well-known simulations such as heat distribution in the package. As a result of this investigation design constraints and methodology to realize such integration are showed in this paper. Suggestions for technology and component arrangement are given in order to guarantee proper performance of the integrated sensors.