• DocumentCode
    2123070
  • Title

    Advanced Function-and Failure Analysis of Monolithic Integrated Travelling Wave Amplifiers by Scanning-Force-Microscopy

  • Author

    Bohm, C. ; Leyk, A. ; Sprengepiel, J. ; Kubalek, E.

  • Author_Institution
    Gerhard-Mercator-Universitÿt-GH Duisburg, Fachgebiet Werkstoffe der Elektrotechnik, BismarckstraÃ\x9fe 81, 47048 Duisburg, Germany
  • Volume
    2
  • fYear
    1994
  • fDate
    5-9 Sept. 1994
  • Firstpage
    1495
  • Lastpage
    1500
  • Abstract
    For the first time a scanning force microscope (SFM) test system is used for high resolution measurements of voltage distributions within a MMIC based on GaAs substrate. An advanced function- and failure analysis is made by comparison of on-gate voltage distributions and topographhy completed by point measurements of device internal signals up to 10 GHz. The results allow studies of device internal voltage distributions in correlation to topography with submicron resolution and gigahertz bandwidth.
  • Keywords
    Failure analysis; Force measurement; Gallium arsenide; MMICs; Microscopy; Signal resolution; Surfaces; System testing; Time measurement; Voltage measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Conference, 1994. 24th European
  • Conference_Location
    Cannes, France
  • Type

    conf

  • DOI
    10.1109/EUMA.1994.337428
  • Filename
    4138474
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2123070