Electro-thermal analysis of flexible micro-heater

Micro heaters have particular applications in the gas sensor and the biotechnological field. The micro heaters are used to obtain the desired constant temperatures over the entire heating surface. Additionally the power consumption should be as low as possible. In this paper we present the electro-thermal characterization of a rectangular pattern mesh micro heater placed on a flexible substrate. Electrical measurements are used as an input for thermal simulation of the heater system. IR measurements show the temperature distribution across the surface of the micro-heater. Thermal analysis is performed using steady state FEM simulations.