Title :
Research and implementation of the interface a data collection management
Author :
Ye, Jiafa ; Liu, Mingzhe ; Wang, Yanan
Author_Institution :
Grad. Univ. of Chinese Acad. of Sci., Beijing, China
Abstract :
According to the requirement of equipment data acquisition of semiconductor manufacturing equipment in the factory automation, this paper presents a new method to acquire the equipment data, which is based on the SEMI Interface A for data collection management. The method defines how to collect the information which we need through the use of a named data collection plan. The testing results show that the method meets the requirement of equipment data acquisition in the factory automation.
Keywords :
computer interfaces; data acquisition; factory automation; production engineering computing; semiconductor device manufacture; SEMI interface A; data collection management; data collection planning; equipment data acquisition; factory automation; semiconductor manufacturing equipment; Data acquisition; Data models; Manufacturing automation; Materials; Simple object access protocol; Standards; XML; Interface A; data collection; factory automation; semiconductor equipment;
Conference_Titel :
Consumer Electronics, Communications and Networks (CECNet), 2012 2nd International Conference on
Conference_Location :
Yichang
Print_ISBN :
978-1-4577-1414-6
DOI :
10.1109/CECNet.2012.6201898
