Development of optical inclinometer in LTCC technology

This paper is focused on the development of the free-standing structures in Low Temperature Co-fired Ceramics (LTCC) using thick film pastes and sacrificial carbon material. There are many ways how to create a free standing thick film structure. One of the methods is using carbon tape with screen printed thick film. Using this method we have created mechanical structures consisting of the thick film bridge suspended between two LTCC parts. These free-standing bridges can act as a mechanical support of a seismic mass. Testing of the suitability of the materials for the manufacturing process was performed. There were three different LTCC substrates and different conductive, resistive and dielectric thick film pastes studied. Mechanical testing of the manufactured free standing bridges was also performed. The optical inclinometer using free-standing thick film structures with seismic mass was designed, manufactured and measured. First tests of the sensor proved the suitability of the free-standing structures for mechanical support of the seismic mass in optical sensors.