Combination of loosely coupled and and compactly coupled integration of CAD tools and their applications in SAW devices design and fabrication

This paper discusses the loosely and compactly coupled integration of CAD tools and their applications in the design and fabrication of surface acoustic wave (SAW) devices. Three core modules are developed as design and mask pattern verification module, database module, and device characteristics simulation module. All the operations are controlled under Microsoft Windows GUI interface. This leads to a reduced design/fabrication cycle, workload and cost. With the addition of a knowledge-based library for intelligent design and Lotus Notes database for distributed and networked engineering database management (EDM) and effective control of documents, a new enterprise-leveled, computer-integrated design and manufacturing system (CIDM) can be established for monolithic and hybrid device designs (not confined to SAW device only)