DocumentCode :
2124819
Title :
On thallium incorporation in GaInTlAs layers grown on InP by low temperature molecular beam epitaxy
Author :
Almazán, F. Sanchez - ; Gendry, M. ; Regreny, P. ; Bergignat, E. ; Grenet, G. ; Hollinger, G. ; Olivares, J. ; Bremond, G. ; Marty, O. ; Pitaval, M.
Author_Institution :
Ecole Centrale de Lyon, Ecully, France
fYear :
2000
fDate :
2000
Firstpage :
376
Lastpage :
379
Abstract :
The growth of GaInTlAs alloys on InP has been attempted by solid source molecular beam epitaxy. Thallium incorporation in Ga1-xInxAs matrices was studied as a function of growth temperature, thallium flux and arsenic overpressure. At high temperatures (>350°C) thallium segregates on the surface and evaporates whereas at intermediary temperatures (270°C-350°C) thallium segregates into droplets at the surface. Only in the low temperature range (180°C-270°C) thallium can be incorporated in some conditions, leading to mirror like surfaces. The thallium incorporation was evidenced by Secondary Ion Mass Spectrometry (SIMS) and Rutherford Backscattering Spectroscopy (RBS). Up to 18% Tl content was incorporated into a Ga1-xInxAs matrix. For these high Tl concentrations, Tl droplets are avoided and Tl incorporation is achieved only when using high arsenic pressures. This limits surface adatom diffusion and leads to amorphous, twinned or polycrystalline materials. Thus, single-crystalline layers have been grown successfully only for low Tl contents (4%) when the V/III beam equivalent pressure (BEP) ratio is chosen as low as possible (~4) while avoiding thallium segregation and droplet formation
Keywords :
III-V semiconductors; Rutherford backscattering; gallium arsenide; indium compounds; molecular beam epitaxial growth; secondary ion mass spectra; semiconductor epitaxial layers; semiconductor growth; stoichiometry; surface diffusion; surface segregation; surface structure; thallium compounds; 180 to 350 C; GaInTlAs; GaInTlAs layers; InP; RBS; Rutherford backscattering spectroscopy; SIMS; Tl content; amorphous material; arsenic overpressure; droplets; growth temperature; low temperature molecular beam epitaxy; mirror like surfaces; polycrystalline material; secondary ion mass spectrometry; solid source molecular beam epitaxy; surface adatom diffusion; surface segregation; thallium incorporation; twinned material; Gallium arsenide; III-V semiconductor materials; Indium phosphide; Lattices; Mass spectroscopy; Mirrors; Molecular beam epitaxial growth; Photonic band gap; Solids; Temperature distribution;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Indium Phosphide and Related Materials, 2000. Conference Proceedings. 2000 International Conference on
Conference_Location :
Williamsburg, VA
ISSN :
1092-8669
Print_ISBN :
0-7803-6320-5
Type :
conf
DOI :
10.1109/ICIPRM.2000.850311
Filename :
850311
Link To Document :
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