Ultrafast, high-power waveguide fed photodetector with integrated spot size converter

Author

Trommer, D. ; Schmidt, D. ; Umbach, A. ; Steingrüber, R. ; Ebert, W. ; Unterbörsch, G.

Author_Institution

Heinrich-Hertz-Inst. fur Nachrichtentech. Berlin GmbH, Germany

fYear

2000

fDate

2000

Firstpage

462

Lastpage

465

Abstract

The monolithic integration of an ultrafast photodetector with an spot size transformer is presented. Using a shifting mask technique optimized taper ramp profiles are fabricated. The integrated devices exhibit a more than doubled responsivity (0.7 A/W) and about one magnitude higher misalignment tolerances compared to devices without spot size converters. The ultra large bandwith (f_3dB>50 GHz) and the excellent high power behaviour is unimpaired by the integration of the spot size converter

Keywords

high-speed optical techniques; integrated optics; optical waveguide components; photodetectors; fabrication; high power waveguide; misalignment tolerance; monolithic integration; responsivity; shifting mask; spot size converter; taper ramp profile; ultrafast photodetector; Etching; Optical fiber devices; Optical films; Optical noise; Optical surface waves; Optical waveguides; Photodetectors; Photodiodes; Resists; Ultrafast optics;

fLanguage

English

Publisher

ieee

Conference_Titel

Indium Phosphide and Related Materials, 2000. Conference Proceedings. 2000 International Conference on

Conference_Location

Williamsburg, VA

ISSN

1092-8669

Print_ISBN

0-7803-6320-5

Type

conf

DOI

10.1109/ICIPRM.2000.850333

Filename

850333