Skin-type tactile sensor using standing piezoresistive cantilever for micro structure detection

We propose a skin-type tactile sensor with standing piezoresistive cantilever to detect micro size texture of object. By forming micro ridges to the sensor surface as a finger print, the sensitivity of the tactile sensor increased for micro texture scanning. This characteristic enabled the detection of 500nm high 300μm wide bumps arranged with 50μm pitch on a flat surface. This result shows the efficiency of proposed sensor for human like texture detection.