A novel micro paramagnetic oxygen sensor based on an anisotropic magneto resistance-device

Author

König, Florian ; Müller, Jörg

Author_Institution

Inst. of Microsyst. Technol., Hamburg Univ. of Technol., Hamburg, Germany

fYear

2010

fDate

1-4 Nov. 2010

Firstpage

1496

Lastpage

1499

Abstract

A novel gas sensor has been developed which makes use of the paramagnetic characteristics of oxygen in order to determine its concentration in a sample gas. The aim of this micro paramagnetic oxygen sensor, based on an anisotropic magneto resistance (AMR)-device, is to provide an accurate, reasonably priced and long-term stable solution for stationary and mobile oxygen measurement. The functional principle is to measure an oxygen concentration via its impact on an external magnetic field. The layout of the new micro-electro-mechanical systems (MEMS)-based sensor is kept simple with no moving parts. First measurements of a prototype show a linear response to oxygen concentrations between 0 and 100%.

Keywords

chemical variables measurement; enhanced magnetoresistance; gas sensors; magnetic field measurement; magnetic sensors; magnetoresistive devices; microsensors; oxygen; MEMS; anisotropic magneto resistance device; functional principle; gas sensor; magnetic field measurement; microelectromechanical system based sensor; microparamagnetic oxygen sensor; mobile oxygen measurement; oxygen concentration measurement; paramagnetic characteristics;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2010 IEEE

Conference_Location

Kona, HI

ISSN

1930-0395

Print_ISBN

978-1-4244-8170-5

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2010.5690346

Filename

5690346