Title :
A novel micro paramagnetic oxygen sensor based on an anisotropic magneto resistance-device
Author :
König, Florian ; Müller, Jörg
Author_Institution :
Inst. of Microsyst. Technol., Hamburg Univ. of Technol., Hamburg, Germany
Abstract :
A novel gas sensor has been developed which makes use of the paramagnetic characteristics of oxygen in order to determine its concentration in a sample gas. The aim of this micro paramagnetic oxygen sensor, based on an anisotropic magneto resistance (AMR)-device, is to provide an accurate, reasonably priced and long-term stable solution for stationary and mobile oxygen measurement. The functional principle is to measure an oxygen concentration via its impact on an external magnetic field. The layout of the new micro-electro-mechanical systems (MEMS)-based sensor is kept simple with no moving parts. First measurements of a prototype show a linear response to oxygen concentrations between 0 and 100%.
Keywords :
chemical variables measurement; enhanced magnetoresistance; gas sensors; magnetic field measurement; magnetic sensors; magnetoresistive devices; microsensors; oxygen; MEMS; anisotropic magneto resistance device; functional principle; gas sensor; magnetic field measurement; microelectromechanical system based sensor; microparamagnetic oxygen sensor; mobile oxygen measurement; oxygen concentration measurement; paramagnetic characteristics;
Conference_Titel :
Sensors, 2010 IEEE
Conference_Location :
Kona, HI
Print_ISBN :
978-1-4244-8170-5
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2010.5690346
