Development of Bragg reflectors with multi-layered porous-silicon structures for optically chemical-sensing applications

Author

Kuen-Hsien Wu

Author_Institution

Dept. of Electro-Opt. Eng., Southern Taiwan Univ. of Sci. & Technol., Tainan, Taiwan

fYear

2013

fDate

25-26 Feb. 2013

Firstpage

365

Lastpage

367

Abstract

Bragg reflectors with multi-layered porous silicon (MLPS) structures had been fabricated on Si substrates using an electrochemically modulation-etching technology. Analysis of reflectivity and photo-response spectra for the developed MLPS Bragg reflectors illustrated that the optical properties of these devices strongly depended on the refractive index of introduced chemical species. Experimental results showed MLPS Bragg reflectors are suitable candidates for development of optically multi-parametric chemical-sensors.

Keywords

chemical sensors; optical elements; refractive index; spectrochemical analysis; Bragg reflector; MLPS; Si; electrochemically modulation-etching technology; multilayered porous-silicon structure; optically chemical-sensing applications; optically multiparametric chemical sensor; photo-response spectra; refractive index; Biomedical optical imaging; Chemicals; Optical device fabrication; Optical reflection; Reflectivity; Refractive index; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Next-Generation Electronics (ISNE), 2013 IEEE International Symposium on

Conference_Location

Kaohsiung

Print_ISBN

978-1-4673-3036-7

Type

conf

DOI

10.1109/ISNE.2013.6512368

Filename

6512368