• DocumentCode
    2126260
  • Title

    Determining the reference impedance of on-wafer TLR calibrations on tossy substrates

  • Author

    Gillon, R. ; Raskin, J.P. ; Vanhoenacker, D. ; Colinge, J.P.

  • Author_Institution
    Universite catholique de Louvain, Laboratoire d´´Hyperfrequences
  • Volume
    1
  • fYear
    1996
  • fDate
    6-13 Sept. 1996
  • Firstpage
    170
  • Lastpage
    173
  • Abstract
    This paper presents an efficient reference impedance determination method, which is applicable to TLR calibrations performed on a wide variety of substrates, including those consisting of low resistivity material. The method is shown to be valid up to 40 GHz. It is based on the comparison of DC-resistance and scattering-parameter measurements of a resistor, a short and an open.
  • Keywords
    CMOS technology; Calibration; Conductivity; Electrical resistance measurement; Impedance measurement; MMICs; Resistors; Scattering parameters; Silicon on insulator technology; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Conference, 1996. 26th European
  • Conference_Location
    Prague, Czech Republic
  • Type

    conf

  • DOI
    10.1109/EUMA.1996.337545
  • Filename
    4138600
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2126260