DocumentCode
2126910
Title
Micromechanics in indium phosphide for opto electrical applications
Author
Hjort, Klas
Author_Institution
Dept. of Mater. Sci., Uppsala Univ., Sweden
Volume
2
fYear
1997
fDate
7-11 Oct 1997
Firstpage
431
Abstract
Indium phosphide based micro opto electro mechanics (MOEMs) hold promises of micromechanical applications in the longer wavelength region, and in particular for applications in telecommunication networks. Recent work on indium phosphide micromechanics is presented: the mechanics, the micromachining and fabrication, and possible future devices and applications
Keywords
III-V semiconductors; indium compounds; micromachining; optoelectronic devices; telecommunication networks; InP; fabrication; micromachining; micromechanical applications; opto electrical applications; telecommunication networks; Gallium arsenide; III-V semiconductor materials; Indium phosphide; Micromachining; Micromechanical devices; Optical fiber sensors; Optical sensors; Optical surface waves; Silicon; Thermal sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 1997. CAS '97 Proceedings., 1997 International
Conference_Location
Sinaia
Print_ISBN
0-7803-3804-9
Type
conf
DOI
10.1109/SMICND.1997.651240
Filename
651240
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