Static and dynamic analysis of a 2D MEMS micromirror

Electrostatically actuated MicroElectroMechanical Systems (MEMS) based micromirror is a fundamental building block for a variety of optical network applications, such as optical wavelength-selective switching, add/drop multiplexing, and optical cross-connecting. A two-dimensional (2D) micro-mirror functioning with a flexible secondary tilting offers tremendous value for the network designers. This paper reports on the design, analysis and testing of a 2D electrostatically actuated torsional MEMS micromirror. The micromirror consists of a traditional gimbal structure allowing steering actions in two orthogonal directions. The characteristics of the device are modeled theoretically and the equations describing device behaviors are validated using a numerical mathematical software. Key structure performances are simulated by coupled field electrostatic and structural analysis using Finite Element Analysis (FEA). The prototype device is fabricated using a standard surface micromachining MEMS process. The static and dynamic performances of the device are characterized and the experimental results are also discussed in the paper.