Microsystem technology for adaptive intracellular sensing and manipulation

Hybrid integration of radiofrequency microswitches into planar microchambers with microfluidics channels for adaptive biosensing applications was recently demonstrated. This paper advocates for an even higher level of integration where the switches are directly embedded into the planar microchamber electrodes to direct its operation between different sensing and probing modes, and for application to biological cells. It is demonstrated that such integration enhances the achievable detection sensitivity with moderate technological complexity.