• DocumentCode
    2129379
  • Title

    Study on the performance of tailored spring elements for piezoelectric MEMS energy harvesters

  • Author

    Sordo, G. ; Iannacci, J. ; Serra, E. ; Bonaldi, M. ; Borrielli, A.L. ; Schneider, M. ; Schmid, U.

  • Author_Institution
    Center for Mater. & Microsyst. (CMM), Fondazione Bruno Kessler (FBK), Trento, Italy
  • fYear
    2015
  • fDate
    3-5 Feb. 2015
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    Energy harvesting has recently attracted much attention of the research community as a key enabling technology in applications such as autonomous Wireless Sensors Network (WSN), Internet of Things (IoT), e-health and more in general all the applicative scenarios requiring an autonomous low power distributed system. Among the various energy harvesting techniques, vibrational piezoelectric energy harvesters have several advantages compare to other solutions (e.g. high output density power, high output voltage). One of the main constraints in the exploitation of such a technology is the limited bandwidth of the devices, intrinsic to the mechanical resonator typically used. In this contribution, different resonators based on a cantilever-like structure are studied both by FEM simulation and by measurements of physical samples. The goal of this preliminary study is to verify the effectiveness of those whip designs for energy harvesting purposes.
  • Keywords
    energy harvesting; finite element analysis; micromechanical devices; piezoelectric transducers; resonators; springs (mechanical); FEM simulation; cantilever-like structure; energy harvesting; piezoelectric MEMS energy harvesters; resonators; tailored spring elements; Electrodes; Energy harvesting; Fabrication; Finite element analysis; Geometry; Micromechanical devices; Resonant frequency; MEMS Energy Harvesting; Piezoelectric AlN;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    AISEM Annual Conference, 2015 XVIII
  • Conference_Location
    Trento
  • Type

    conf

  • DOI
    10.1109/AISEM.2015.7066779
  • Filename
    7066779