Design of MEMS mass sensors based of flexural phononic crystals

Author

Luschi, Luca ; Pieri, Francesco

Author_Institution

Dipt. di Ing. dell´Inf., Univ. di Pisa, Pisa, Italy

fYear

2015

fDate

3-5 Feb. 2015

Firstpage

1

Lastpage

4

Abstract

In this work, a piezoelectrically actuated MEMS flexural phononic crystal (PC) mass sensor aimed at biosensing applications, and based on a single crystal silicon beam with periodic perforations, is presented. We introduce a transmission matrix approach based on the Timoshenko beam theory suited for the fast design of such devices. The calculated transmission spectra are in excellent agreement with FEM simulations. A preliminary estimate of the device sensitivity, assuming the prostate specific antigen (PSA) as the target analyte, is reported.

Keywords

biosensors; elemental semiconductors; finite element analysis; mass measurement; microsensors; phononic crystals; piezoelectric actuators; piezoelectric transducers; silicon; FEM simulation; PC; PSA; Si; Timoshenko beam theory; biosensing application; flexural phononic crystal; periodic perforation; piezoelectrically actuated MEMS flexural phononic crystal mass sensor; prostate specific antigen; single crystal silicon beam; target analyte; transmission matrix approach; Crystals; Finite element analysis; Frequency response; Photonic band gap; Sensitivity; Sensors; Solids; MEMS; mass sensors; phononic crystals; resonant sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

AISEM Annual Conference, 2015 XVIII

Conference_Location

Trento

Type

conf

DOI

10.1109/AISEM.2015.7066802

Filename

7066802