Title :
Hybrid interferometer for control of three degrees of freedom
Author :
Lawall, J. ; Howard, L. ; Deslattes, R.D. ; Chien-Ming Wu
Author_Institution :
Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
Abstract :
We describe a quadruple Michelson heterodyne interferometer for measuring longitudinal displacement, pitch, and yaw of a target mirror relative to a stationary one. A Fabry-Perot interferometer provides independent control of systematic errors.
Keywords :
Fabry-Perot interferometers; Michelson interferometers; displacement measurement; heterodyne detection; measurement errors; mirrors; Fabry-Perot interferometer; X-ray interferometry; longitudinal displacement; mirror; pitch; position sensing; quadruple Michelson heterodyne interferometer; systematic errors; yaw; Control systems; Displacement measurement; Fabry-Perot interferometers; Frequency measurement; Laser beams; Measurement standards; Mirrors; Optical interferometry; Optical mixing; Optical reflection;
Conference_Titel :
Precision Electromagnetic Measurements Digest, 2000 Conference on
Conference_Location :
Sydney, NSW, Australia
Print_ISBN :
0-7803-5744-2
DOI :
10.1109/CPEM.2000.851021
