Title :
Micromachined silicon radiation sensors - Part 1: Design and experimental characterization
Author :
Bagolini, A. ; Boscardin, M. ; Conci, P. ; Crivellari, M. ; Giacomini, G. ; Mattedi, F. ; Piemonte, C. ; Ronchin, S. ; Zorzi, N. ; Benkechkache, M.A. ; Dalla Betta, G.-F. ; Mendicino, R. ; Pancheri, L. ; Povoli, M. ; Sultan, D.M.S.
Author_Institution :
Centro per i Mater. e i Microsistemi, Fondazione Bruno Kessler, Trento, Italy
Abstract :
Silicon radiation sensors fabricated with micromachining technologies offer a number of advantages compared to their planar counterparts, making them appealing for an increasing number of applications. This paper provides an overview of the most interesting developments in this field by Fondazione Bruno Kessler in collaboration with the University of Trento.
Keywords :
elemental semiconductors; micromachining; microsensors; radiation detection; silicon; Fondazione Bruno Kessler; University of Trento; micromachined silicon radiation sensor; Cavity resonators; Detectors; Neutrons; Sensor phenomena and characterization; Silicon; Three-dimensional displays; 3D sensors; TCAD simulations; micromachining; silicon radiation sensor;
Conference_Titel :
AISEM Annual Conference, 2015 XVIII
Conference_Location :
Trento
DOI :
10.1109/AISEM.2015.7066825
