Title :
Design of acoustic particle velocity sensors with a coupled 3D-2D finite element model
Author :
Piotto, Massimo ; Zanetti, Enrico ; Bruschi, Paolo
Author_Institution :
IEIIT, Pisa, Italy
Abstract :
A coupled 2D-3D finite element model developed with COMSOL Multiphysics software platform is proposed to design novel acoustic particle velocity sensors. The device consists of four silicided polysilicon wires arranged in a Wheatstone full-bridge configuration. Each wire has been divided into three segments placed over suspended silicon dioxide membranes. The dependence of the device sensitivity and frequency response on geometric dimensions has been investigated.
Keywords :
acoustic transducers; computerised instrumentation; finite element analysis; membranes; particle detectors; sensors; velocity measurement; COMSOL Multiphysics software platform; Wheatstone full-bridge configuration; acoustic particle velocity sensor; coupled 3D-2D finite element model; frequency response; silicided polysilicon wire; suspended silicon dioxide membrane; Acoustics; Atmospheric modeling; Sensitivity; Sensors; Solid modeling; Three-dimensional displays; Wires; acoustic sensors; finite element simulations; integrated sensors;
Conference_Titel :
AISEM Annual Conference, 2015 XVIII
Conference_Location :
Trento
DOI :
10.1109/AISEM.2015.7066841
