Evaluation of capacitance and resistance standards at higher frequencies

Four terminal-pair (4TP) capacitance and resistance standards were compared against coaxial standards up to 15 MHz using a four terminal pair impedance analyzer. Both commercial and custom designed 4TP to coaxial adapters were used and evaluated in the measurement process. Coaxial standards were measured on RF reflection coefficient measuring system. Measurement results were compared to those obtained by other techniques and circuit modeling predictions. The agreement within 0.1% at 10 MHz for the capacitance or resistance part of admittance was sought.