Design of a PZT-based MEMS Rotman lens

Author

Sinjari, Ahmad ; Chowdhury, Sazzadur

Author_Institution

Dept. of Electr. & Comput. Eng., Windsor, Univ., Windsor, ON

fYear

2008

fDate

4-7 May 2008

Abstract

The design of a MEMS Rotman lens that uses a high dielectric constant PZT (Lead Zirconium Titanate) thick film to fill the lens cavity has been presented. The 56 mum thick Rotman lens has a footprint area of 5.5x7.1 mm², incorporates 3 beam ports, 5 array ports, and operates at 77 GHz. The small size of the Rotman lens beamformer enables to fabricate both the transmit and receive beamformers on the opposite sides of the same wafer to realize a compact MEMS based radar when integrated with necessary microelectronic circuits and microstrip antennas. Analytical simulation results show that the developed beamformer can resolve an angular resolution of up to four degrees. A fabrication procedure for the MEMS Rotman lens has been developed and verified by simulating in IntelliSuitetrade. This microscale implementation enables the Rotman lens to be used as an integral part of a radar unit for automotive collision avoidance applications.

Keywords

dielectric materials; lead compounds; microlenses; radar equipment; road vehicle radar; thick films; IntelliSuite; PZT; PZT-based MEMS; Rotman lens; automotive collision avoidance; beamformers; compact MEMS based radar; dielectric constant thick film; microelectronic circuits; microstrip antennas; Circuit simulation; High-K gate dielectrics; Lenses; Micromechanical devices; Microstrip antennas; Optical design; Radar antennas; Thick films; Titanium compounds; Zirconium; Collision avoidance; MEMS; PZT; Radar; Rotman lens;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical and Computer Engineering, 2008. CCECE 2008. Canadian Conference on

Conference_Location

Niagara Falls, ON

ISSN

0840-7789

Print_ISBN

978-1-4244-1642-4

Electronic_ISBN

0840-7789

Type

conf

DOI

10.1109/CCECE.2008.4564712

Filename

4564712