Title :
A micromechanical RMS-to-DC converter
Author :
Kyynarainen, J. ; Oja, A.S. ; Seppa, H.
Author_Institution :
VTT Autom., Finland
Abstract :
A micromechanical silicon device has been designed for use as a precise batch-fabricated AC voltage to DC voltage converter. The converter measures the difference of the electrostatic RMS forces induced by AC and DC voltages.
Keywords :
convertors; electrostatic actuators; measurement errors; transfer standards; voltage measurement; AC-DC voltage converter; PID controller; RMS-to-DC converter; SOI wafer; correction circuit; electrostatic RMS forces; micromechanical silicon device; precise batch-fabricated converter; seesaw structures; systematic error; Analog-digital conversion; Capacitance; Capacitors; Electrostatics; Equations; Force feedback; Micromechanical devices; Resonance; Resonant frequency; Voltage;
Conference_Titel :
Precision Electromagnetic Measurements Digest, 2000 Conference on
Conference_Location :
Sydney, NSW, Australia
Print_ISBN :
0-7803-5744-2
DOI :
10.1109/CPEM.2000.851203
