Title :
A micromechanical DC-voltage reference
Author :
Oja, A.S. ; Kyynarainen, J. ; Seppa, H. ; Lampola, T.
Author_Institution :
VTT Autom., Finland
Abstract :
Prototype of a novel DC voltage reference has been constructed. A characteristic voltage of an electrostatically actuated micromechanical silicon device provides the reference voltage. Its stability relies on elastic properties of monocrystalline silicon. The device is suited for batch fabrication and may prove more stable than Zener voltage references.
Keywords :
circuit feedback; electrostatic actuators; measurement uncertainty; transfer standards; voltage measurement; Si; batch fabrication; characteristic voltage; device stability; displacement fluctuations; elastic properties dependence; electrostatically actuated device; micromechanical DC-voltage reference; monocrystalline silicon; pull-in voltage tracking; spring constant; uncertainty; Capacitors; Elasticity; Electrodes; Electrostatics; Iron; Micromechanical devices; Silicon; Springs; Stability; Voltage;
Conference_Titel :
Precision Electromagnetic Measurements Digest, 2000 Conference on
Conference_Location :
Sydney, NSW, Australia
Print_ISBN :
0-7803-5744-2
DOI :
10.1109/CPEM.2000.851204
