The multichannel microprobe for recording/stimulation of neural/muscular activity, CMOS technology compatible

Author

Moldovan, Carmen ; Iosub, Rodica ; Nechifor, Ghe ; Radu, C. ; Bogdan, Daniela ; Flueraru, C. ; Cernic, I. ; Vasilco, Roxana ; Dinoiu, Ioana

Author_Institution

Inst. of Microtechnol., Bucharest, Romania

Volume

2

fYear

1997

fDate

7-11 Oct 1997

Firstpage

533

Abstract

This paper presents the description, the technological steps, the specific process of fabrication of a multichannel microprobe for recording/stimulation the neural/muscular activity. Few problems of anisotropic etching are analyzed. The compatibility between the materials used in the semiconductor fabrication and the human body is analyzed. The final goal is the treatment of chronic pain in a closed loop scheme of electric recording and stimulation in the brain

Keywords

CMOS integrated circuits; bioelectric phenomena; biomedical electronics; biosensors; etching; microsensors; muscle; neurophysiology; patient treatment; CMOS technology; anisotropic etching; brain; chronic pain treatment; closed loop system; electric recording; electric stimulation; human body; multichannel microprobe; muscular activity; neural activity; semiconductor fabrication; Anisotropic magnetoresistance; Biosensors; Boron; CMOS technology; Chemical technology; Electronic circuits; Etching; Gold; Humans; Probes;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference, 1997. CAS '97 Proceedings., 1997 International

Conference_Location

Sinaia

Print_ISBN

0-7803-3804-9

Type

conf

DOI

10.1109/SMICND.1997.651306

Filename

651306