Title :
The multichannel microprobe for recording/stimulation of neural/muscular activity, CMOS technology compatible
Author :
Moldovan, Carmen ; Iosub, Rodica ; Nechifor, Ghe ; Radu, C. ; Bogdan, Daniela ; Flueraru, C. ; Cernic, I. ; Vasilco, Roxana ; Dinoiu, Ioana
Author_Institution :
Inst. of Microtechnol., Bucharest, Romania
Abstract :
This paper presents the description, the technological steps, the specific process of fabrication of a multichannel microprobe for recording/stimulation the neural/muscular activity. Few problems of anisotropic etching are analyzed. The compatibility between the materials used in the semiconductor fabrication and the human body is analyzed. The final goal is the treatment of chronic pain in a closed loop scheme of electric recording and stimulation in the brain
Keywords :
CMOS integrated circuits; bioelectric phenomena; biomedical electronics; biosensors; etching; microsensors; muscle; neurophysiology; patient treatment; CMOS technology; anisotropic etching; brain; chronic pain treatment; closed loop system; electric recording; electric stimulation; human body; multichannel microprobe; muscular activity; neural activity; semiconductor fabrication; Anisotropic magnetoresistance; Biosensors; Boron; CMOS technology; Chemical technology; Electronic circuits; Etching; Gold; Humans; Probes;
Conference_Titel :
Semiconductor Conference, 1997. CAS '97 Proceedings., 1997 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-3804-9
DOI :
10.1109/SMICND.1997.651306
