A development of automated chemical-solution-deposition machine for micro actuator with multilayered PZT thick film

Author

Kawai, Yusuke ; Moriwaki, Nobuyoshi ; Ono, Takahito ; Esashi, Masayoshi

Author_Institution

Grad. Sch. of Eng., Tohoku Univ., Sendai, Japan

fYear

2010

fDate

1-4 Nov. 2010

Firstpage

2247

Lastpage

2250

Abstract

The automated chemical-solution-deposition machine, which can repeat a deposition and a crystallization of the PZT thin film, is developed for micro actuator with multilayered PZT thick film. A 2 and 4-inch wafer can be handled in the drying, sintering and crystallizing furnaces step by step using robot arm after being dispensed and spin-coated sol-gel solution. The robot arm movement, the temperature of furnaces and the processing times of every step can be adjusted using a programmable logic controller. The maximum thickness of deposited PZT film of 3.8-μm is achieved by 44-times iteration with 32-hours in one sequence. The remanent polarization of 10-μC/cm², the coercive field of 28-kV/cm and maximum polarization of 24-μC/cm² are obtained which shows the capability of soft piezoelectric material for the micro actuator.

Keywords

coating techniques; crystallisation; manipulators; microactuators; microfabrication; piezoelectric materials; programmable controllers; sintering; sol-gel processing; thick films; PZT thin film crystallization; automated chemical-solution deposition machine; coercive field; crystallizing furnaces step; maximum polarization; microactuator; multilayered PZT thick film; piezoelectric material; programmable logic controller; remanent polarization; robot arm movement; size 2 inch; size 3.8 mum; size 4 inch; spin-coated sol-gel solution; time 32 hr;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2010 IEEE

Conference_Location

Kona, HI

ISSN

1930-0395

Print_ISBN

978-1-4244-8170-5

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2010.5690701

Filename

5690701