Title :
3D microstructured cantilevers for optical detection applications
Author :
Muller, Raluca ; Pavelescu, Loan ; Moagar-Poladian, Victor ; Manea, Elena ; Nedelcu, Oana-Tatiana ; Avramescu, Morel
Author_Institution :
Inst. of Microtechnol., Bucharest, Romania
Abstract :
In this work we report integrated SiON light waveguides on cantilevers realised by silicon anisotropic etching techniques. The cantilever structure is a multilayered structure and consists in a SiO 2/SiON/SiO2 sandwich. To strongly improve our technological processes, internal stresses in a such structure have been evaluated using simple stress models presented in literature. For comparison a finite element analysis using ANSYS software was performed
Keywords :
etching; finite element analysis; integrated optics; internal stresses; microsensors; optical waveguides; photodetectors; silicon compounds; 3D microstructured cantilever; ANSYS software; SiO2-SiON-SiO2; SiO2/SiON/SiO2 sandwich; finite element analysis; integrated SiON light waveguide; internal stress model; multilayered structure; optical detection; silicon anisotropic etching; Anisotropic magnetoresistance; Etching; Finite element methods; Geometrical optics; Internal stresses; Optical detectors; Optical waveguides; Performance analysis; Silicon; Software performance;
Conference_Titel :
Semiconductor Conference, 1997. CAS '97 Proceedings., 1997 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-3804-9
DOI :
10.1109/SMICND.1997.651308
