Title :
A method for more accurate measurement of diffraction gratings efficiency
Author :
Dragnea, L. ; Ilie, M. ; Vitriuc, A. ; Sindile, P. ; Iancu, O.
Author_Institution :
Inst. of Microtechnol., Bucharest, Romania
Abstract :
A simpler and efficient measuring method for diffraction grating efficiency is presented. To measure the diffraction efficiency an optical system and a photodetector are used. The method consists in simplifying the optical system by replacing the output of the optical system with an aperture, and in calculating the distance between the photodetector and this aperture
Keywords :
diffraction gratings; optical transfer function; optical variables measurement; photodetectors; aperture; diffraction grating; efficiency measurement; optical system; optical transfer function; photodetector; Apertures; Diffraction gratings; Focusing; Laser beam cutting; Laser beams; Lenses; Mirrors; Optical diffraction; Photodetectors; Transfer functions;
Conference_Titel :
Semiconductor Conference, 1997. CAS '97 Proceedings., 1997 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-3804-9
DOI :
10.1109/SMICND.1997.651312
