Title :
Dielectric and semiconductor membranes as support for microwave circuits
Author :
Muller, A. ; Petrini, I. ; Avramescu, V. ; Muller, R. ; Vasilache, D. ; Cosmin, P. ; Cernica, I. ; Marcelli, R. ; Fogllieti, V.
Author_Institution :
Nat. Inst. for Res. & Dev. in Microtechnol., Bucharest, Romania
Abstract :
A 1.5 μm thin SiO2/Si3N4/SiO 2 membrane was manufactured on ⟨100⟩ Silicon substrate. Also a 10-20 μm thin GaAs membrane was manufactured using a new etching solution. Both types of membranes are destined to be used as support for microwave circuits; this has as effect a major improvement of circuits´ performances
Keywords :
etching; membranes; microwave circuits; <100> silicon substrate; GaAs; Si; SiO2-Si3N4-SiO2; dielectric membrane; etching; microwave circuit; semiconductor membrane; support; Biomembranes; Dielectric substrates; Etching; Gallium arsenide; Manufacturing; Microwave circuits; Millimeter wave technology; Semiconductor device manufacture; Silicon; Submillimeter wave technology;
Conference_Titel :
Semiconductor Conference, 1997. CAS '97 Proceedings., 1997 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-3804-9
DOI :
10.1109/SMICND.1997.651315
