• DocumentCode
    2137663
  • Title

    Dielectric and semiconductor membranes as support for microwave circuits

  • Author

    Muller, A. ; Petrini, I. ; Avramescu, V. ; Muller, R. ; Vasilache, D. ; Cosmin, P. ; Cernica, I. ; Marcelli, R. ; Fogllieti, V.

  • Author_Institution
    Nat. Inst. for Res. & Dev. in Microtechnol., Bucharest, Romania
  • Volume
    2
  • fYear
    1997
  • fDate
    7-11 Oct 1997
  • Firstpage
    549
  • Abstract
    A 1.5 μm thin SiO2/Si3N4/SiO 2 membrane was manufactured on ⟨100⟩ Silicon substrate. Also a 10-20 μm thin GaAs membrane was manufactured using a new etching solution. Both types of membranes are destined to be used as support for microwave circuits; this has as effect a major improvement of circuits´ performances
  • Keywords
    etching; membranes; microwave circuits; <100> silicon substrate; GaAs; Si; SiO2-Si3N4-SiO2; dielectric membrane; etching; microwave circuit; semiconductor membrane; support; Biomembranes; Dielectric substrates; Etching; Gallium arsenide; Manufacturing; Microwave circuits; Millimeter wave technology; Semiconductor device manufacture; Silicon; Submillimeter wave technology;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference, 1997. CAS '97 Proceedings., 1997 International
  • Conference_Location
    Sinaia
  • Print_ISBN
    0-7803-3804-9
  • Type

    conf

  • DOI
    10.1109/SMICND.1997.651315
  • Filename
    651315
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2137663