DocumentCode
2137666
Title
Dynamic Scheduling for Semiconductor Wafer Fabrication Based on ETAEMS and MAS
Author
Ma, Xin ; He, Ying ; Shi, Xiaohu ; Liang, Yanchun
Author_Institution
Coll. of Comput. Sci. & Technol., Jilin Univ., Changchun, China
fYear
2010
fDate
18-22 Aug. 2010
Firstpage
282
Lastpage
287
Abstract
The dynamic scheduling problem of semiconductor wafer fabrication is a highly complicated discrete event system. Based on multi-agent system and ETAEMS method, this paper develops an efficient dynamic scheduling system called by MEBDSS. Intelligent computing algorithms are also applied in the method. Computational experiment results show that the proposed method is effective and better than existing methods.
Keywords
dynamic scheduling; multi-agent systems; production engineering computing; semiconductor device manufacture; ETAEMS; MAS; discrete event system; dynamic scheduling; intelligent computing algorithms; multiagent system; semiconductor wafer fabrication; Assembly; Dynamic scheduling; Etching; Fabrication; Job shop scheduling; Semiconductor device modeling;
fLanguage
English
Publisher
ieee
Conference_Titel
Frontier of Computer Science and Technology (FCST), 2010 Fifth International Conference on
Conference_Location
Changchun, Jilin Province
Print_ISBN
978-1-4244-7779-1
Type
conf
DOI
10.1109/FCST.2010.21
Filename
5575727
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