Title :
MOEMS acoustic sensors for Structural Health Monitoring
Author :
Zhang, Yang ; Tsai, Jonas ; Li, Guann-Pyng ; Feng, Maria Q. ; Bachman, Mark
Author_Institution :
Dept. of Electr. Eng., Univ. of California, Irvine, CA, USA
Abstract :
MOEMS (Micro-Opto-Electro-Mechanical Systems) acoustic sensors are employed to detect acoustic emissions (AE) for Structural Health Monitoring (SHM). Acoustic sensing cantilevers (~200 × 100 × 50 μm) with variable frequency response, directionality and dynamic range can be fabricated in large quantity using a novel non-silicon process. The packaged sensors are low-cost, easy-to-install and EMI free during operation. The acoustic sensors´ broadband sensitivity is demonstrated by standard structural break tests.
Keywords :
cantilevers; condition monitoring; fracture toughness testing; micro-optomechanical devices; microsensors; structural engineering; EMI free; MOEMS acoustic sensors; acoustic emission detection; acoustic sensing cantilever; broadband sensitivity; frequency response; novel nonsilicon process; standard structural break tests; structural health monitoring;
Conference_Titel :
Sensors, 2010 IEEE
Conference_Location :
Kona, HI
Print_ISBN :
978-1-4244-8170-5
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2010.5690794
