Title :
Integrated Optics on Silicon Substrate for Microwave Applications
Author :
Chouteau, S. ; Cabon, B. ; Boussey, J.
Author_Institution :
LEMO; LPCS, ENSERG/INPG, UMR CNRS 5530/5531, 23 rue des martyrs, BP 257, 38016 Grenoble Cedex, FRANCE. chouteau@enserg.fr
Abstract :
Integrated optics on silicon substrate for use as non-perturbative control of microwave devices is described. In silica, a buried silicon nitride channel waveguide, with 1 dB/cm propagation losses at a wavelength of 0.82 ¿m, was monolithically integrated with a simple coplanar microwave waveguide switch in order to demonstrate the high efficiency of the integrated device applied to phased array antenna systems.
Keywords :
Coplanar waveguides; Integrated optics; Microwave antenna arrays; Microwave devices; Optical control; Optical switches; Optical waveguides; Phased arrays; Propagation losses; Silicon compounds;
Conference_Titel :
Microwave Conference, 1998. 28th European
Conference_Location :
Amsterdam, Netherlands
DOI :
10.1109/EUMA.1998.338094
