Title :
Study of magnetically isolated diode with dielectric anode at repetitive rate operation mode
Author :
Lopatin, V.S. ; Remnev, G.E. ; Stepanov, A.V.
Author_Institution :
High Voltage Res. Inst., Tomsk, Russia
Abstract :
High-power ion beams (HPIB) find a wide application for the modification of construction material surfaces and for the deposition of metal and semi-conductive films [1]. High effectiveness of these technologies stimulates the study of magnetically isolated diodes (MID). The diodes with radial magnetic field (Br-field) possess a row of advantages [2, 3]. The important aspect of practical application of MID is the increase of MID pulse repetition rate. To create plasma on the anode, basically, two approaches are used. The first one is pulsed gas introduction in area of the anode with its subsequent ionization [4]. The second one is plasma formation on the surface of dielectric filling on the anode [5]. The increase of diode operation frequency is related to the pressure alteration in the working chamber and stability of MID parameters at that. Earlier [6] we reached a rather high life time of MID operation with dielectric anode without a significant degradation of anode coating after 104 pulses. In these studies MID with ballistic focusing and passive plasma source was used.
Keywords :
dielectric materials; ion beams; ion sources; plasma instability; plasma sources; semiconductor diodes; HPTB; MID pulse repetition rate; construction material surfaces; dielectric anode; dielectric filling; diode operation frequency; high-power ion beams; magnetically isolated diode; magnetically isolated diodes; metal deposition; passive plasma source; plasma formation; pulsed gas introduction; radial magnetic field; repetitive rate operation mode; semiconductive films; Anodes; Compounds; Dielectrics; Ionization; Metals; Plasmas; Pressure measurement;
Conference_Titel :
High Power Particle Beams (BEAMS), 2008 17th International Conference on
Conference_Location :
Xian