• DocumentCode
    2140958
  • Title

    PECVD SiC-SiO2-SiC horizontal slot waveguides for sensing photonics devices

  • Author

    Pandraud, G. ; Neira, A. Barbosa ; Sarro, P.M. ; Margallo-Balbás, E.

  • Author_Institution
    Lab. of Electron. Components, Mater. & Technol., Tech. Univ. Delft, Delft, Netherlands
  • fYear
    2010
  • fDate
    1-4 Nov. 2010
  • Firstpage
    975
  • Lastpage
    978
  • Abstract
    We report for the first time on the use of PECVD SiC-SiO2-SiC horizontal slot waveguides as optical sensors. The propagation losses are measured and found to be 23.9 dB/cm for the quasi-TM mode. To assess the potential of such devices as sensors we first simulated the confinement in the slot. It shows a sharp drop that can be advantageously used for sensing. The power in the slot measured for different slot materials, indicates a confinement factor change of 0.15/refractive index unit.
  • Keywords
    nanophotonics; optical sensors; optical waveguides; plasma CVD; refractive index; silicon compounds; wide band gap semiconductors; PECVD; SiC-SiO2-SiC; confinement factor; horizontal slot waveguides; optical sensors; quasiTM mode; refractive index; sensing photonics devices; slot materials;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2010 IEEE
  • Conference_Location
    Kona, HI
  • ISSN
    1930-0395
  • Print_ISBN
    978-1-4244-8170-5
  • Electronic_ISBN
    1930-0395
  • Type

    conf

  • DOI
    10.1109/ICSENS.2010.5690912
  • Filename
    5690912
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2140958