DocumentCode :
2140958
Title :
PECVD SiC-SiO2-SiC horizontal slot waveguides for sensing photonics devices
Author :
Pandraud, G. ; Neira, A. Barbosa ; Sarro, P.M. ; Margallo-Balbás, E.
Author_Institution :
Lab. of Electron. Components, Mater. & Technol., Tech. Univ. Delft, Delft, Netherlands
fYear :
2010
fDate :
1-4 Nov. 2010
Firstpage :
975
Lastpage :
978
Abstract :
We report for the first time on the use of PECVD SiC-SiO2-SiC horizontal slot waveguides as optical sensors. The propagation losses are measured and found to be 23.9 dB/cm for the quasi-TM mode. To assess the potential of such devices as sensors we first simulated the confinement in the slot. It shows a sharp drop that can be advantageously used for sensing. The power in the slot measured for different slot materials, indicates a confinement factor change of 0.15/refractive index unit.
Keywords :
nanophotonics; optical sensors; optical waveguides; plasma CVD; refractive index; silicon compounds; wide band gap semiconductors; PECVD; SiC-SiO2-SiC; confinement factor; horizontal slot waveguides; optical sensors; quasiTM mode; refractive index; sensing photonics devices; slot materials;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Sensors, 2010 IEEE
Conference_Location :
Kona, HI
ISSN :
1930-0395
Print_ISBN :
978-1-4244-8170-5
Electronic_ISBN :
1930-0395
Type :
conf
DOI :
10.1109/ICSENS.2010.5690912
Filename :
5690912
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2140958
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