Design of integrated MEMs

Surface micromachining has become an established technology for the integration of miniature sensing and actuation devices such as accelerometers, gyroscopes, displays, or mechanical filters. Standard IC processing and materials leads to low cost and small size, while tight integration with interface electronics, often on the same substrate, yields good performance and high flexibility. The key characteristics of surface micromachining technology are explored based on several examples of sensors, both commercial and at the research stage. Different fabrication approaches are described and the requirements and design challenges for the electronic interface circuitry discussed. The paper closes with an investigation of system issues such as force-feedback control