• DocumentCode
    2144255
  • Title

    The effects of slot positioning on the bandwidth of a micromachined resonator

  • Author

    Harle, Lee ; Papapolymerou, John ; East, Jack ; Katehi, Linda P B

  • Author_Institution
    Department of Electrical Engineering and Computer Science, The University of Michigan, 1301 Beal Avenue, Ann Arbor, MI 48109-2122
  • Volume
    2
  • fYear
    1998
  • fDate
    Oct. 1998
  • Firstpage
    664
  • Lastpage
    668
  • Abstract
    This paper presents the effect of slot positions on the bandwidth and the response of a micromachined high-Q X-Band resonator formed by a micromachined cavity. Theory and experiment indicate that a narrow-band, low-loss response can be achieved by changing the placement of the slots relative to the center of the cavity. As a result, narrow-band, low-loss, monolithic filters with small weight and planar characteristics can be designed.
  • Keywords
    Bandwidth; Coplanar waveguides; Fabrication; Insertion loss; Loss measurement; Microstrip; Narrowband; Packaging; Plasma measurements; Resonator filters;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Conference, 1998. 28th European
  • Conference_Location
    Amsterdam, Netherlands
  • Type

    conf

  • DOI
    10.1109/EUMA.1998.338234
  • Filename
    4139289
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2144255