Title :
Novel MEMS Phase Shifters and Wideband Switches for Microwave and MM-wave Applications
Author :
Barker, N.S. ; Rebeiz, G.M.
Author_Institution :
Radiation Laboratory, Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI 48105, USA. sbarker@engin.umich.edu
Abstract :
True-time delay (TTD) phase shifters and wideband switches have been developed using distributed microelectromechanical system (MEMS) transmission lines. The design consists of a CPW transmission line (W=G=100 ¿m) fabricated on a 500 ¿m quartz substrate with fixed-fixed beam MEMS bridge capacitors placed periodically over the transmission line, thus creating a slow-wave structure. The measured results demonstrate 0-60 GHz 4.5 psec TTD phase shifters with 2 dB loss/118° phase shift at 60 GHz, and switches with an isolation of better than 40 dB from 21-40 GHz and 40-60 GHz.
Keywords :
Bridge circuits; Capacitors; Coplanar waveguides; Delay; Microelectromechanical systems; Micromechanical devices; Phase shifters; Switches; Transmission line measurements; Wideband;
Conference_Titel :
Microwave Conference, 1998. 28th European
Conference_Location :
Amsterdam, Netherlands
DOI :
10.1109/EUMA.1998.338246
