DocumentCode
2144945
Title
Integration of carbon nanotubes in microelectronics
Author
Swart, Jacobus ; Moshkalev, Stanislav
Author_Institution
Res. Center CenPRA, Campinas, Brazil
fYear
2008
fDate
20-23 Oct. 2008
Firstpage
584
Lastpage
587
Abstract
Practical aspects of synthesis and applications of single-wall and multi-wall carbon nanotubes (SWNT and MWNT, respectively) are presented. Among numerous potential applications, utilization of nanotubes for interconnections in microelectronics and in gas sensors is considered in more detail. The issues related to compatibility of nanotubes synthesis and manipulation processes with the Si planar technology are analysed.
Keywords
carbon nanotubes; elemental semiconductors; integrated circuit interconnections; nanoelectronics; silicon; C; Si; gas sensors; interconnections; microelectronics; multiwall carbon nanotubes; planar technology; single-wall carbon nanotubes; Carbon nanotubes; Contact resistance; Copper; Current density; Integrated circuit interconnections; Integrated circuit synthesis; Jacobian matrices; Microelectronics; Semiconductivity; Semiconductor nanotubes;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State and Integrated-Circuit Technology, 2008. ICSICT 2008. 9th International Conference on
Conference_Location
Beijing
Print_ISBN
978-1-4244-2185-5
Electronic_ISBN
978-1-4244-2186-2
Type
conf
DOI
10.1109/ICSICT.2008.4734606
Filename
4734606
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