DocumentCode
2146172
Title
Integration challenge of silicon photonics with microelectronics
Author
Paniccia, Mario ; Liu, Ansheng ; Izhaky, Nahum ; Barkai, Assia
Author_Institution
Photonics Technol. Lab., Intel Corp., Santa Clara, CA, USA
fYear
2005
fDate
21-23 Sept. 2005
Firstpage
20
Lastpage
22
Abstract
In this presentation we discuss some practical issues and challenges associated with processing silicon photonic devices in a high volume CMOS manufacturing environment and the challenges of integrating the photonic devices with microelectronics.
Keywords
CMOS integrated circuits; elemental semiconductors; integrated optics; integrated optoelectronics; silicon; CMOS manufacturing; Si; microelectronics; silicon photonic devices; silicon photonics integration; CMOS process; Costs; Electronics packaging; Integrated optics; Manufacturing processes; Microelectronics; Monolithic integrated circuits; Optical materials; Photonics; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Group IV Photonics, 2005. 2nd IEEE International Conference on
Print_ISBN
0-7803-9070-9
Type
conf
DOI
10.1109/GROUP4.2005.1516389
Filename
1516389
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