DocumentCode
2146378
Title
Applications of silicon-based photonic crystals
Author
Wehrspohn, R.B.
Author_Institution
Dept. of Phys., Paderborn Univ., Germany
fYear
2005
fDate
21-23 Sept. 2005
Firstpage
39
Lastpage
41
Abstract
Silicon is the dominant material in semiconductor industry to date. Novel nanostructuring technologies, such as ICP-plasma etching, photo-electrochemical etching as well as colloidal self-assembly of monodisperse silica spheres, may lead to novel application of silicon in photonics. Three different areas of applications will be discussed: integrated optical devices, sensors and photovoltaic devices. In the area of integrated optics, the properties SOI ridge waveguides and photonic crystal waveguides will be discussed and the possibility of tuning the optical properties. Concerning sensing, novel design for the gas interaction compartment based on macroporous silicon photonic crystals are presented. Macroporous silicon can be prepared uniformly on 6-inch silicon wafers and the holes can penetrate the whole silicon wafer. This enables gas flow through the holes and optical detection perpendicular to this direction in the plane of the periodicity. Finally, possible applications of silicon nanostructures in the area of third generation solar cells are presented.
Keywords
colloids; elemental semiconductors; integrated optics; nanostructured materials; nanotechnology; optical sensors; optical tuning; optical waveguides; photoelectrochemistry; photonic crystals; photovoltaic effects; porous materials; ridge waveguides; self-assembly; silicon; silicon compounds; silicon-on-insulator; solar cells; sputter etching; ICP-plasma etching; SOI ridge waveguides; Si; Si-SiO2; colloidal self-assembly; gas flow; gas interaction compartment; integrated optical devices; integrated optics; macroporous silicon; monodisperse silica spheres; nanostructuring technologies; optical detection; optical sensors; optical tuning; photoelectrochemical etching; photonic crystal waveguides; photonics; photovoltaic devices; semiconductor industry; silicon nanostructures; silicon wafers; silicon-based photonic crystals; third generation solar cells; Crystalline materials; Etching; Integrated optics; Nanostructured materials; Optical materials; Optical sensors; Optical waveguides; Photonic crystals; Silicon; Solar power generation;
fLanguage
English
Publisher
ieee
Conference_Titel
Group IV Photonics, 2005. 2nd IEEE International Conference on
Print_ISBN
0-7803-9070-9
Type
conf
DOI
10.1109/GROUP4.2005.1516396
Filename
1516396
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