Title :
Mechanism of the current quenching phenomenon in pseudospark discharge
Author :
Korolev, Yu.D. ; Frants, O.B. ; Geyman, V.G. ; Ivashov, R.V. ; Landl, N.V. ; Shemyakin, I.A. ; Frank, K. ; Bischoff, R. ; Iberler, M. ; Urban, J.
Author_Institution :
Inst. of High-Current Electron., Acad. of Sci., Tomsk, Russia
Abstract :
Experimental data on the current quenching phenomenon in the pseudospark discharge in typical conditions of EUV source operation (extremely short pulse duration and high current) are presented. The mechanism of the phenomenon is proposed.
Keywords :
cathodes; glow discharges; ionisation; sparks; vacuum arcs; EUV source operation; current quenching phenomenon; extremely short pulse duration; gas discharge plasma; high current; high pulsed current quenching; hollow cathode discharge; ionization rate; low pressure discharges; plasma column; pseudospark discharge; vacuum discharges; Anodes; Boring; Capacitors; Cathodes; Current density; Electrodes; Fault location; Plasma density; Plasma measurements; Switches;
Conference_Titel :
Discharges and Electrical Insulation in Vacuum, 2002. 20th International Symposium on
Print_ISBN :
0-7803-7394-4
DOI :
10.1109/ISDEIV.2002.1027416
