Abstract :
As CMOS scaling continuous successfully, technologies for integrating both memory and logic together is highly desirable for high performance and low-power system-on-chip (SOC) with full CMOS compatibility, such as Logic based NVM, floating-body DRAM, MiM based eDRAM, PC-RAM, RRAM, MRAM, FeRAM, ...etc.. New materials (e.g. GST, metal-oxide, high-k, magnetic junction, ...etc.) have greater compatibility in BEOL. Thus, fully CMOS compatible SOC is a promising trend into the future.
Keywords :
CMOS memory circuits; DRAM chips; system-on-chip; CMOS memory circuits; FeRAM; MRAM; NVM; PC-RAM; RRAM; eDRAM; floating-body DRAM; nonvolatile memories; system-on-chip; CMOS logic circuits; CMOS technology; Channel hot electron injection; High K dielectric materials; High-K gate dielectrics; MIM capacitors; Nonvolatile memory; Random access memory; SONOS devices; Tunneling;
