Title :
Si-based membrane resonant cavity enhanced photodetectors
Author :
Cheng, Buwen ; Yao, Fei ; Xue, Chunlai ; Zhang, Jianguo ; Mao, Rongwei ; Li, Chuanbo ; Luo, Liping ; Zuo, Yuhua ; Wang, Qiming
Author_Institution :
Inst. of Semicond., Chinese Acad. of Sci., Beijing, China
Abstract :
Si-based membrane RCE photodetectors were introduced. The RCE photodiodes were fabricated on silicon membranes formed from SOI substrate. Compared with the conventional p-i-n photodiode, the responsivity has a threefold enhancement.
Keywords :
cavity resonators; elemental semiconductors; integrated optics; membranes; optical resonators; photodetectors; photodiodes; silicon; SOI substrate; Si; Si-based membrane photodetectors; photodiodes; resonant cavity enhanced photodetectors; silicon membranes; Biomembranes; Etching; Germanium silicon alloys; Mirrors; PIN photodiodes; Photodetectors; Quantum dots; Resonance; Silicon germanium; Substrates;
Conference_Titel :
Group IV Photonics, 2005. 2nd IEEE International Conference on
Print_ISBN :
0-7803-9070-9
DOI :
10.1109/GROUP4.2005.1516419
