DocumentCode
2146952
Title
Si-based membrane resonant cavity enhanced photodetectors
Author
Cheng, Buwen ; Yao, Fei ; Xue, Chunlai ; Zhang, Jianguo ; Mao, Rongwei ; Li, Chuanbo ; Luo, Liping ; Zuo, Yuhua ; Wang, Qiming
Author_Institution
Inst. of Semicond., Chinese Acad. of Sci., Beijing, China
fYear
2005
fDate
21-23 Sept. 2005
Firstpage
105
Lastpage
107
Abstract
Si-based membrane RCE photodetectors were introduced. The RCE photodiodes were fabricated on silicon membranes formed from SOI substrate. Compared with the conventional p-i-n photodiode, the responsivity has a threefold enhancement.
Keywords
cavity resonators; elemental semiconductors; integrated optics; membranes; optical resonators; photodetectors; photodiodes; silicon; SOI substrate; Si; Si-based membrane photodetectors; photodiodes; resonant cavity enhanced photodetectors; silicon membranes; Biomembranes; Etching; Germanium silicon alloys; Mirrors; PIN photodiodes; Photodetectors; Quantum dots; Resonance; Silicon germanium; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Group IV Photonics, 2005. 2nd IEEE International Conference on
Print_ISBN
0-7803-9070-9
Type
conf
DOI
10.1109/GROUP4.2005.1516419
Filename
1516419
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