DocumentCode :
2147051
Title :
Trimming of silicon nitride microring resonators with a polysilane top cladding
Author :
Sparacin, Daniel K. ; Lock, John P. ; Hong, Ching-Yin ; Gleason, K.K. ; Kimerling, L.C. ; Michel, Jurgen
Author_Institution :
MIT, Cambridge, MA, USA
fYear :
2005
fDate :
21-23 Sept. 2005
Firstpage :
117
Lastpage :
119
Abstract :
We demonstrate 23.5 nm shifts of Si3N4 microring resonances by exposing a polysilane cladding layer to UV light. Our PECVD polysilane cladding is superior to other approaches, because it is insoluble, demonstrates good stability, and exhibits ∼4% index shift.
Keywords :
claddings; micro-optics; optical polymers; optical resonators; plasma CVD; silicon compounds; PECVD; Si3N4; index shift; polysilane top cladding; silicon nitride microring resonators; Circuits; Laser modes; Optical filters; Optical resonators; Optical ring resonators; Refractive index; Resonance; Ring lasers; Silicon; Ultrafast optics;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Group IV Photonics, 2005. 2nd IEEE International Conference on
Print_ISBN :
0-7803-9070-9
Type :
conf
DOI :
10.1109/GROUP4.2005.1516423
Filename :
1516423
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2147051
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