• DocumentCode
    2147051
  • Title

    Trimming of silicon nitride microring resonators with a polysilane top cladding

  • Author

    Sparacin, Daniel K. ; Lock, John P. ; Hong, Ching-Yin ; Gleason, K.K. ; Kimerling, L.C. ; Michel, Jurgen

  • Author_Institution
    MIT, Cambridge, MA, USA
  • fYear
    2005
  • fDate
    21-23 Sept. 2005
  • Firstpage
    117
  • Lastpage
    119
  • Abstract
    We demonstrate 23.5 nm shifts of Si3N4 microring resonances by exposing a polysilane cladding layer to UV light. Our PECVD polysilane cladding is superior to other approaches, because it is insoluble, demonstrates good stability, and exhibits ∼4% index shift.
  • Keywords
    claddings; micro-optics; optical polymers; optical resonators; plasma CVD; silicon compounds; PECVD; Si3N4; index shift; polysilane top cladding; silicon nitride microring resonators; Circuits; Laser modes; Optical filters; Optical resonators; Optical ring resonators; Refractive index; Resonance; Ring lasers; Silicon; Ultrafast optics;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Group IV Photonics, 2005. 2nd IEEE International Conference on
  • Print_ISBN
    0-7803-9070-9
  • Type

    conf

  • DOI
    10.1109/GROUP4.2005.1516423
  • Filename
    1516423
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2147051