DocumentCode
2147180
Title
High-performance hetero-nanocrystal memories
Author
Li, Bei ; Zhu, Yan ; Zhou, Huimei ; Liu, Jianlin
Author_Institution
Dept. of Electr. Eng., Univ. of California at Riverside, Riverside, CA, USA
fYear
2008
fDate
20-23 Oct. 2008
Firstpage
947
Lastpage
950
Abstract
Metal-oxide-semiconductor field effect transistor (MOSFET) memories with self-aligned hetero-nanocrystals (TiSi2/Si and Ge/Si) as the floating gates were fabricated and characterized. Better performances were found in hetero-nanocrystal memory, including longer retention time, larger storage capability and improved writing efficiency.
Keywords
MOSFET; nanostructured materials; semiconductor storage; Ge-Si; MOSFET memory; TiSi2-Si; floating gates; hetero-nanocrystal memory; metal-oxide-semiconductor field effect transistor memorie; self-aligned hetero-nanocrystals; storage capability; Atomic force microscopy; Germanium; Hetero-nanocrystal memory; MOSFETs; Nanocrystals; Nonvolatile memory; Self-assembly; Silicon; Tunneling; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State and Integrated-Circuit Technology, 2008. ICSICT 2008. 9th International Conference on
Conference_Location
Beijing
Print_ISBN
978-1-4244-2185-5
Electronic_ISBN
978-1-4244-2186-2
Type
conf
DOI
10.1109/ICSICT.2008.4734699
Filename
4734699
Link To Document