Title :
Design and fabrication of Bragg reflectors based on SU-8
Author :
Shu, Zhen ; Wan, Jing ; Xie, Shen-Qi ; Lu, Bing-Rui ; Chen, Yifang ; Qu, Xin-Ping ; Liu, Ran
Author_Institution :
Dept. of Microelectron., Fudan Univ., Shanghai, China
Abstract :
We report the design and fabrication of two kinds of distributed Bragg reflectors (DBRs). One is a Bragg filter which introduces a periodic height modulation in part of a waveguide, and the other is a horizontal DBR with a deeply patterned grating structure in a waveguide at a freespace wavelength of 1.55 um (the propagation loss of quartz fiber used in optical communication is lowest around 1.55 um wavelength) based on a Si/SiO2/SU8/air structure. The transfer matrix theory was used to calculate the spectral response of the Bragg filter and its dependence on the height modulation and the grating length. In addition, a multilayer film reflection theory was applied to simulate reflection spectrum of the DBR and estimate the least number of pairs of DBR mirrors needed for almost 100% (¿ 99.6%) reflection. Based on the simulation results, we designed and successfully fabricated these two types of DBRs with Si/SiO2/SU8/air structures.
Keywords :
Bragg gratings; air; distributed Bragg reflectors; optical fibre filters; optical fibre losses; optical multilayers; polymer films; quartz; reflectivity; silicon; Bragg filter; DBR mirrors; deeply patterned grating structure; distributed Bragg reflectors; freespace wavelength; multilayer film; optical communication; periodic height modulation; propagation loss; quartz fiber; reflection theory; spectral response; transfer matrix theory; waveguide; wavelength 1.55 mum; Bragg gratings; Distributed Bragg reflectors; Fabrication; Fiber gratings; Optical fiber communication; Optical fiber filters; Optical reflection; Optical waveguide components; Optical waveguides; Periodic structures;
Conference_Titel :
Solid-State and Integrated-Circuit Technology, 2008. ICSICT 2008. 9th International Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-2185-5
Electronic_ISBN :
978-1-4244-2186-2
DOI :
10.1109/ICSICT.2008.4734710
