• DocumentCode
    2147813
  • Title

    Integration of SiON gratings with SOI

  • Author

    Jones, Richard ; Cohen, Oded ; Chan, Henry ; Rubin, Doron ; Fang, Alex ; Paniccia, Mario

  • Author_Institution
    Intel Corp., Santa Clara, CA, USA
  • fYear
    2005
  • fDate
    21-23 Sept. 2005
  • Firstpage
    192
  • Lastpage
    194
  • Abstract
    In this paper we discuss integrating silicon oxynitride (SiON) waveguides onto silicon-on-insulator and demonstrate the thermal advantages of a grating fabricated using this technology.
  • Keywords
    diffraction gratings; integrated optics; optical fabrication; optical waveguides; silicon compounds; silicon-on-insulator; SOI; SiON; integrating SiON gratings; silicon oxynitride waveguides; silicon-on-insulator; Conducting materials; Etching; Gratings; Optical waveguides; Propagation losses; Refractive index; Silicon; Thermal conductivity; Thermooptical devices; Waveguide junctions;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Group IV Photonics, 2005. 2nd IEEE International Conference on
  • Print_ISBN
    0-7803-9070-9
  • Type

    conf

  • DOI
    10.1109/GROUP4.2005.1516449
  • Filename
    1516449
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2147813