Title :
Integration of SiON gratings with SOI
Author :
Jones, Richard ; Cohen, Oded ; Chan, Henry ; Rubin, Doron ; Fang, Alex ; Paniccia, Mario
Author_Institution :
Intel Corp., Santa Clara, CA, USA
Abstract :
In this paper we discuss integrating silicon oxynitride (SiON) waveguides onto silicon-on-insulator and demonstrate the thermal advantages of a grating fabricated using this technology.
Keywords :
diffraction gratings; integrated optics; optical fabrication; optical waveguides; silicon compounds; silicon-on-insulator; SOI; SiON; integrating SiON gratings; silicon oxynitride waveguides; silicon-on-insulator; Conducting materials; Etching; Gratings; Optical waveguides; Propagation losses; Refractive index; Silicon; Thermal conductivity; Thermooptical devices; Waveguide junctions;
Conference_Titel :
Group IV Photonics, 2005. 2nd IEEE International Conference on
Print_ISBN :
0-7803-9070-9
DOI :
10.1109/GROUP4.2005.1516449
