Title :
Hybrid integration of III/V lasers on a silicon-on-insulator (SOI) optical board
Author :
Mitze, T. ; Schnarrenberger, M. ; Zimmermann, L. ; Bruns, J. ; Fidorra, F. ; Kreissl, Jochen ; Janiak, K. ; Fidorra, S. ; Heidrich, H. ; Petermann, K.
Author_Institution :
Inst. fur Hochfrequenz- und Halbleiter-Systemtechnologien, Tech. Univ. Berlin, Germany
Abstract :
A multipurpose optical platform in SOI technology is presented. Hybrid integration of the active devices is realised by AuSn solder technology. The device adjustment by passive self-alignment is in the 1μm tolerance range.
Keywords :
III-V semiconductors; gold alloys; integrated optoelectronics; semiconductor lasers; silicon-on-insulator; soldering; tin alloys; AuSn solder technology; III/V lasers; Si; hybrid integration; passive self-alignment; silicon-on-insulator optical board; Integrated optics; Optical devices; Optical receivers; Optical refraction; Optical resonators; Optical transmitters; Optical variables control; Optical waveguides; Silicon on insulator technology; Waveguide lasers;
Conference_Titel :
Group IV Photonics, 2005. 2nd IEEE International Conference on
Print_ISBN :
0-7803-9070-9
DOI :
10.1109/GROUP4.2005.1516455