Title :
Impact of process variability on a frequency-addressed NEMS array sensor used for gravimetric detection
Author :
Martin, Olivier ; Colinet, E. ; Sage, E. ; Dupre, C. ; Villard, Patrick ; Hentz, S. ; Duraffourg, L. ; Ernst, Thomas
Author_Institution :
CEA-Leti, Grenoble, France
Abstract :
Based on experimental results and a dedicated model, the impact of various technological parameters on the performance of a frequency addressed NEMS arrays sensor is investigated for mass sensing application. It is shown that the number of NEMS resonators that can be addressed in parallel is limited by critical dimensions fluctuations, the quality factor of the NEMS and their resonance frequencies.
Keywords :
Q-factor; gravimeters; mass measurement; micromechanical resonators; nanoelectromechanical devices; sensor arrays; NEMS resonators; critical dimensions fluctuations; frequency-addressed NEMS array sensor; gravimetric detection; mass sensing application; process variability; quality factor; resonance frequency; technological parameters; Arrays; Dispersion; Fabrication; Frequency measurement; Nanoelectromechanical systems; Resonant frequency; Silicon;
Conference_Titel :
Solid-State Device Research Conference (ESSDERC), 2013 Proceedings of the European
Conference_Location :
Bucharest
DOI :
10.1109/ESSDERC.2013.6818820
