Title :
On the forming-free operation of HfOx based RRAM devices: Experiments and ab initio calculations
Author :
Traore, B. ; Vianello, E. ; Molas, G. ; Gely, M. ; Nodin, J.F. ; Jalaguier, E. ; Blaise, P. ; De Salvo, B. ; Fonseca, L.R.C. ; Xue, K.-H. ; Nishi, Yoshio
Author_Institution :
LTMA (Lab. des Technol. Memoires Av.), CEA, Grenoble, France
Abstract :
We show experimentally that the first reset operation of forming-free HfOx based RRAM devices is of bulk type where the reset current is area dependent. Moreover, the device pristine resistance shows a weak inverse proportionality to temperature, which we associate to a sub-stoichiometric HfOx matrix created during device fabrication. Finally, we use ab initio calculations to gain insight into the atomistic structure of these forming-free RRAM devices.
Keywords :
ab initio calculations; hafnium compounds; integrated circuit manufacture; random-access storage; stoichiometry; HfOx; ab initio calculations; atomistic structure; device fabrication; device pristine resistance; forming-free RRAM devices; substoichiometric HfOx matrix; Electrodes; Hafnium compounds; Resistance; Switches; Temperature measurement;
Conference_Titel :
Solid-State Device Research Conference (ESSDERC), 2013 Proceedings of the European
Conference_Location :
Bucharest
DOI :
10.1109/ESSDERC.2013.6818846